Fabrication and evaluation of polymer MEMS mirror based on the mechanical characteristic of polymer containing magnetic particles

Author

Miura, Tsuyoshi ; Suzuki, Takumi ; Terao, Kyohei ; Takao, Hidekuni ; Oohira, Fumikazu ; Kaibara, Y. ; Namazu, T.

Author_Institution

Dept. of Intell. Mech. Syst. Eng., Kagawa Univ., Takamatsu, Japan

fYear

2011

fDate

8-11 Aug. 2011

Firstpage

175

Lastpage

176

Abstract

In this study, we have evaluated the mechanical characteristic and the attractive force of the SU-8 containing magnetic particles. Then, we have fabricated the mirror device based on the mechanical characteristic of the polymer and evaluated the deflection characteristic. Two kinds of the mirror devices composed of SU-8 containing Fe₂O₃ (particle size: p.s.5μm) and Fe₃O₄ (p.s.5μm) particles are fabricated and evaluated. The optical deflection angles of both devices are ±20° in a small current. Then, we confirmed the possibility to realize the low cost and large deflection angle polymer MEMS mirror using SU-8 containing magnetic particles.

Keywords

iron compounds; magnetic particles; micro-optomechanical devices; microfabrication; micromirrors; optical fabrication; optical polymers; particle size; Fe₂O₃; Fe₃O₄; SU-8 polymer; deflection properties; magnetic particles; mechanical properties; optical deflection angles; optical fabrication; particle size; polymer MEMS mirror; size 5 mum; Force; Glass; Magnetic particles; Micromechanical devices; Mirrors; Polymers; Stress; MEMS; Magnetic Particles; Mirror; Polymer; SU-8;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2011 International Conference on

Conference_Location

Istanbul

ISSN

2160-5033

Print_ISBN

978-1-4577-0334-8

Type

conf

DOI

10.1109/OMEMS.2011.6031025

Filename

6031025