Title :
Fabrication of polydimethylsiloxane microlens arrays on curved surfaces
Author :
Aldalali, B. ; Difeng Zhu ; Hongrui Jiang
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Wisconsin-Madison, Madison, WI, USA
Abstract :
We report on polydimethlysiloxane (PDMS) microlens arrays on curved surfaces. The mold of the microlens arrays was formed using the photoresist reflow method on top of SU-8 islands connected to each other by a thin layer of SU-8. The mold was transferred to PDMS using a double transfer method. Stress simulation determined that when placed on a curved surface the flexible polymer connecting the microlens arrays endured the most stress minimizing the optical deformation of the microlens arrays. Focal point results demonstrate uniformity of the microlenses within an array with an estimated focal length of 330 μm.
Keywords :
deformation; microlenses; optical arrays; optical fabrication; optical polymers; photoresists; SU-8 islands; curved surfaces; double transfer method; flexible polymer; focal point; optical deformation; photoresist reflow method; polydimethylsiloxane microlens arrays; stress simulation; Bridges; Fabrication; Lenses; Microoptics; Optical arrays; Stress; Surface treatment; curved surfaces; microlens array; photoresist reflow;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031029
