MEMS endomicroscope for simultaneous bright-field microscopy and optical coherence tomography

Author

Blattmann, M. ; Kretschmer, S. ; Thiele, S. ; Zappe, H. ; Herkommer, A. ; Seifert, A.

Author_Institution

Dept. of Microsyst. Eng.-IMTEK, Univ. of Freiburg, Freiburg, Germany

fYear

2015

fDate

21-25 June 2015

Firstpage

216

Lastpage

219

Abstract

We present the first silicon-based endomicroscope that combines wide field and confocal imaging modalities in a single device, whose functionality includes simultaneous operation of bright-field microscopy and optical coherence tomography (OCT). This highly-compact multi-modal probe is based on silicon bulk micromachining and has cross-sectional dimensions of 2×2.76mm². The achieved lateral resolutions are 6.2 μm and 17.8 μm for bright-field microscopy and OCT, respectively.

Keywords

bioMEMS; biomedical optical imaging; elemental semiconductors; endoscopes; micromachining; optical microscopy; optical tomography; silicon; MEMS endomicroscope; OCT; Si; confocal imaging modalities; cross-sectional dimensions; highly-compact multimodal probe; lateral resolutions; optical coherence tomography; silicon bulk micromachining; silicon-based endomicroscope; simultaneous bright-field microscopy; Image resolution; Lithography; Micromechanical devices; Optical device fabrication; Optical imaging; Silicon compounds; Multi-modal imaging; bright-field microscopy; optical coherence tomography; silicon optical bench;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7180900

Filename

7180900