Closed-loop pressure control of an adaptive single chamber membrane lens with integrated actuation

Author

Draheim, J. ; Burger, Thomas ; Kamberger, R. ; Wallrabe, U.

Author_Institution

Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany

fYear

2011

fDate

8-11 Aug. 2011

Firstpage

47

Lastpage

48

Abstract

We introduce a closed-loop pressure control of a single chamber adaptive fluidic membrane lens with an integrated piezoelectric bending actuator. For this purpose a pressure sensor is integrated into the lens and allows for a measurement of the chamber pressure as a function of the refractive power. The linear relation between pressure and refractive power allows to eliminate the typical hysteresis effects of piezo actuators.

Keywords

adaptive optics; closed loop systems; integrated optics; lenses; optical control; piezoelectric actuators; pressure control; pressure measurement; pressure sensors; chamber pressure measurement; closed-loop pressure control; hysteresis effects; integrated actuation; integrated piezoelectric bending actuator; pressure sensor; refractive power; single chamber adaptive fluidic membrane lens; Actuators; Fabrication; Glass; Lenses; Optical sensors; Pressure measurement; Substrates; adaptive lens; control; pressure sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2011 International Conference on

Conference_Location

Istanbul

ISSN

2160-5033

Print_ISBN

978-1-4577-0334-8

Type

conf

DOI

10.1109/OMEMS.2011.6031036

Filename

6031036