Design and fabrication of polymer MEMS mirror based on the mechanical characteristic evaluation of polyimide materials

Author

Sasaki, O. ; Terao, Kyohei ; Suzuki, Takumi ; Takao, Hidekuni ; Oohira, Fumikazu ; Kaibara, Y. ; Namazu, T.

Author_Institution

Dept. of Intell. Mech. Syst. Eng., Kagawa Univ., Kagawa, Japan

fYear

2011

fDate

8-11 Aug. 2011

Firstpage

183

Lastpage

184

Abstract

We fabricated millimeter size tensile specimens using the photosensitive polyimide as the moving part of the our proposed polymer MEMS mirror device. The mechanical characteristics of the polyimide are evaluated in the temperature range of -50~300°. As the result, Young´s modulus and tensile strength of the photosensitive polyimide also decreased as the temperature increased, but there was no substantial change in the characteristic values in the supposed usage temperature range of -10~70°. Based on the results, the polymer MEMS mirror torsion bar was designed and the deflection value was simulated by FEM analysis. The designed and measured angles show relative good agreement.

Keywords

Young´s modulus; finite element analysis; micro-optomechanical devices; microfabrication; micromirrors; optical design techniques; optical fabrication; optical polymers; tensile strength; FEM analysis; Young´s modulus; angle measurement; deflection value; mechanical properties; millimeter size tensile specimen fabrication; photosensitive polyimide; polymer MEMS mirror torsion bar design; temperature -10 degC to 70 degC; temperature -50 degC to 300 degC; tensile strength; Micromechanical devices; Mirrors; Polyimides; Temperature; Temperature dependence; Temperature measurement; Glass substrate; MEMS Mirror; Mechanical characteristic; Photosensitive Polymer; Polyimide;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2011 International Conference on

Conference_Location

Istanbul

ISSN

2160-5033

Print_ISBN

978-1-4577-0334-8

Type

conf

DOI

10.1109/OMEMS.2011.6031037

Filename

6031037