Title :
A deformable mirror with perforated backplate for high-speed operation with controlled damping
Author :
Moghimi, Mohammad J. ; Chattergoon, Krishna N. ; Strathman, M.J. ; Wilson, Campbell ; Dickensheets, David L.
Author_Institution :
Electr. & Comput. Eng. Dept., Montana State Univ., Bozeman, MT, USA
Abstract :
Cryogenic deep silicon etching creates through-wafer perforations in the backplate of a MEMS deformable mirror in order to control air damping and achieve wide-bandwidth actuation. Design approach, fabrication and characterization are shown.
Keywords :
damping; elemental semiconductors; etching; micro-optomechanical devices; microfabrication; micromirrors; optical design techniques; optical fabrication; silicon; MEMS deformable mirror; Si; controlled air damping; controlled damping; cryogenic deep silicon etching; high-speed operation; perforated backplate; through-wafer perforations; wide-bandwidth actuation; Bandwidth; Damping; Frequency response; Measurement by laser beam; Micromechanical devices; Mirrors; Silicon; MEMS Deformable Mirrors; MEMS microphone; air damping; cryogenic DRIE;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031048
