Thin film conductivity sensor based on acoustoelectric interaction in 36° YX lithium tantalate

Author

Ciplys, D. ; Rimeika, R. ; Sereika, A.

Author_Institution

Dept. of Radiophys., Vilnius Univ., Vilnius, Lithuania

fYear

2013

fDate

16-20 June 2013

Firstpage

1883

Lastpage

1886

Abstract

The acoustoelectric interaction of leaky surface acoustic wave (LSAW) on 36° rotated Y-cut X-propagation lithium tantalate was studied and the thin film conductivity sensor was implemented on this base. The technique of slow evaporation of thin copper film on the wave propagation surface with simultaneous measurements of the wave amplitude and phase was used. The observed strong response of the LSAW to the film conductivity is explained by the acoustoelectric attenuation and velocity change. The sheet conductivity extracted from the changes in wave amplitude and phase was compared with the results of DC resistance measurements. The potential of LSAWs in LiTaO₃ for contactless monitoring of changes in thin film conductivity has been demonstrated.

Keywords

acoustoelectric devices; electrical conductivity; lithium compounds; surface acoustic wave sensors; thin film sensors; 36° rotated Y-cut X-propagation lithium tantalate; DC resistance measurements; LiTaO₃; acoustoelectric interaction; contactless monitoring; leaky surface acoustic wave; sheet conductivity; thin copper film evaporation; thin film conductivity sensor; wave amplitude; wave propagation surface; Conductivity; Conductivity measurement; Crystals; Films; Surface acoustic waves; Surface treatment; Leaky surface acoustic waves; acoustoelectric interaction; conductivity sensor; lithium tantalate; thin metal film;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627159

Filename

6627159