DocumentCode
3461445
Title
Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner
Author
Cheo, Kelvin K. L. ; Guangya Zhou ; Yu Du ; Fook Siong Chau
Author_Institution
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fYear
2011
fDate
8-11 Aug. 2011
Firstpage
17
Lastpage
18
Abstract
A built-in angular sensing mechanism unique to the vibratory grating scanner is demonstrated through utilizing the zeroth-order beam, of which the intensity variation is affected by the angular position of the grating platform. With the first-order diffracted beam used for optical scanning, the stationary zeroth-order beam can be used for angular position sensing.
Keywords
angular measurement; diffraction gratings; optical scanners; optical sensors; angular position; first-order diffracted beam; high-resolution vibratory grating scanner; optical angular position sensing mechanism; optical scanning; stationary zeroth-order beam; zeroth-order beam; Gratings; Laser beams; Measurement by laser beam; Optical device fabrication; Optical feedback; Optical sensors; MEMS; angular position sensing; grating scanners; micromirrors;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location
Istanbul
ISSN
2160-5033
Print_ISBN
978-1-4577-0334-8
Type
conf
DOI
10.1109/OMEMS.2011.6031055
Filename
6031055
Link To Document