• DocumentCode
    3461486
  • Title

    Development of CMOS MEMS thermal bimorph actuator for driving microlens

  • Author

    Kah How Koh ; Chengkuo Leee ; Jyun-Hong Lu ; Chii-Chang Chen

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
  • fYear
    2011
  • fDate
    8-11 Aug. 2011
  • Firstpage
    153
  • Lastpage
    154
  • Abstract
    A CMOS MEMS based thermal actuator is developed by using bimorph with embedded SiO2 and inverted-connected metal line adopted from CMOS materials. Vertical displacement of 47μm and power consumption of 139mW is obtained at 3Vdc.
  • Keywords
    CMOS integrated circuits; integrated optoelectronics; micro-optomechanical devices; microactuators; microlenses; power consumption; silicon compounds; CMOS MEMS thermal bimorph actuator; SiO2; inverted-connected metal line; microlens; power consumption; vertical displacement; voltage 3 V; Actuators; CMOS integrated circuits; Lenses; Metals; Microoptics; Optical device fabrication; Optical imaging; Microlens; Optical Microelectromechanical Systems; Thermal Actuator;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
  • Conference_Location
    Istanbul
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-0334-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2011.6031057
  • Filename
    6031057
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3461486