Title :
Development of CMOS MEMS thermal bimorph actuator for driving microlens
Author :
Kah How Koh ; Chengkuo Leee ; Jyun-Hong Lu ; Chii-Chang Chen
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A CMOS MEMS based thermal actuator is developed by using bimorph with embedded SiO2 and inverted-connected metal line adopted from CMOS materials. Vertical displacement of 47μm and power consumption of 139mW is obtained at 3Vdc.
Keywords :
CMOS integrated circuits; integrated optoelectronics; micro-optomechanical devices; microactuators; microlenses; power consumption; silicon compounds; CMOS MEMS thermal bimorph actuator; SiO2; inverted-connected metal line; microlens; power consumption; vertical displacement; voltage 3 V; Actuators; CMOS integrated circuits; Lenses; Metals; Microoptics; Optical device fabrication; Optical imaging; Microlens; Optical Microelectromechanical Systems; Thermal Actuator;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031057
