Title :
RF nano switch based on single crystalline graphene
Author :
Li, P. ; Cui, T.
Author_Institution :
Dept. of Precision Instrum., Tsinghua Univ., Beijing, China
Abstract :
Growth of monolayer single-crystalline graphene using low pressure chemical vapor deposition (LPCVD) method is reported. Radio frequency (RF) nano switches based on coplanar waveguide double-clamped single-crystalline graphene membrane was achieved for the first time. Owing to the single crystalline nature, its life time (> 5000 times) is much longer than polycrystalline graphene (PCG) switches (4-5 times [1]). It exhibits small pull-in voltage (~1 V) and superb signal isolation (c30 dB at 40 GHz) which can be further improved by graphene´s unique electric field effect.
Keywords :
CVD coatings; graphene devices; microwave switches; nanoelectromechanical devices; LPCVD method; RF nanoswitch; coplanar waveguide; electric field effect; low pressure chemical vapor deposition; monolayer single crystalline graphene growth; radio frequency nanoswitch; Copper; Films; Grain boundaries; Graphene; Nanoelectromechanical systems; Radio frequency; Switches; Graphene; RF switch; radio frequency; single crystalline;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7180922
