DocumentCode
3461571
Title
Flip-up micro scanning mirror with vertical comb drive assembled by simple push operations
Author
Cheng-An Chen ; Yi Chiu
Author_Institution
Dept. of Electr. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
fYear
2011
fDate
8-11 Aug. 2011
Firstpage
189
Lastpage
190
Abstract
A novel flip-up micro scanning mirror is fabricated in SOI substrates with SU8 vertical comb drive actuators. The device is assembled by simple push operation. The design and fabrication of the device is presented.
Keywords
integrated optics; micro-optomechanical devices; microactuators; micromirrors; optical design techniques; optical fabrication; silicon-on-insulator; SOI substrates; SU8 vertical comb drive actuators; Si; flip-up microscanning mirror; optical design; optical fabrication; push operations; Actuators; Assembly; Integrated optics; Mirrors; Optical device fabrication; Probes; assembly; flip-up; scanning mirror; vertical comb drive;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location
Istanbul
ISSN
2160-5033
Print_ISBN
978-1-4577-0334-8
Type
conf
DOI
10.1109/OMEMS.2011.6031061
Filename
6031061
Link To Document