Dynamic Characteristic Research of Traveling Wave Driving Microfluid Model

Ultrasonic traveling wave microfluid driving is different from the present microdriving techniques in principle. The dynamic characteristic of model is of great importance to the microfluid driving. In this paper, the relation between driving mechanism and model parameters is given from the research on the forming mechanism of acoustic radiation pressure and acoustic streaming. Based on the analysis of the finite element method (FEM), it discusses the relation between model´s natural frequency and elastic body parameters, and analyzes how the channel size affects the natural frequency. By the harmonic response analysis based on the anti-piezoelectric effect, the anticipated vibration mode is successfully excited at the point of resonance frequency, and the frequency characteristic of response amplitude is obtained