DocumentCode :
3461711
Title :
Perfect adsorption of PPB-level surfactant in 5% KOH water solution on a silicon surface changing anisotropic etching properties
Author :
Tanaka, Hiroya ; Umeki, N. ; Sato, Kiminori
Author_Institution :
Tsuruoka Nat. Coll. of Technol., Yamagata, Japan
fYear :
2013
fDate :
16-20 June 2013
Firstpage :
1978
Lastpage :
1981
Abstract :
This paper reports the effect of ppb-level non-ionic surfactant, Triton-X-100, on the etching of Si {100} and Si {110} plane in 5wt% KOH solution. Si {100} and Si {110} etching rates decreased dramatically when 10 ppb of Triton was added to 5wt% KOH solution. In pure 5wt% KOH solution, micro-pyramids appear on the Si {100} etched surface and long zigzag shapes dominate Si {110} surface morphologies. However, in 5wt% KOH with addition of ppb-level of Triton, the etched surface becomes mirror-like. This result shows that a ppb-level of Triton is adsorbed perfectly on the silicon surface during etching.
Keywords :
elemental semiconductors; etching; silicon; surfactants; KOH water solution; PPB-level surfactant; Si; Triton-X-100; perfect adsorption; silicon surface changing anisotropic etching properties; Etching; Scanning electron microscopy; Shape; Silicon; Surface emitting lasers; Surface morphology; Anisotropic wet etching; Etching rate; Micro-pyramid; Silicon; Surfactant;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
Type :
conf
DOI :
10.1109/Transducers.2013.6627183
Filename :
6627183
Link To Document :
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