Combination of temperature cycled and gate bias cycled operation to enhance the selectivity of SiC-FET gas sensors

In this paper temperature modulation and gate bias modulation of a gas sensitive field effect transistor are combined in order to increase the selectivity. Data evaluation was performed using multivariate statistics, here by Linear Discriminant Analysis. It was found that both temperature cycling and gate bias cycling are suitable for quantification of different concentrations of carbon monoxide. However, combination of both approaches enhances the quality of the separation. In addition, the presented method allows discrimination of carbon monoxide, nitrogen dioxide and ammonia independent of the gas concentration.