• DocumentCode
    3461987
  • Title

    Suppression of the leakage effect in 64°YX-LiNbO3 for thick aluminium electrodes

  • Author

    Plessky, Victor P. ; Hartmann, Clinton S. ; Koskela, Julius

  • Author_Institution
    Micronas Semicond. SA, Bevaix, Switzerland
  • Volume
    2
  • fYear
    1996
  • fDate
    3-6 Nov 1996
  • Firstpage
    1603
  • Abstract
    In this paper we discuss the consequences of heavy mass loading on the propagation of leaky-waves on 64°YX-cut LiNbO3. It has been predicted that using heavy and thick electrodes it is possible to slow down the leaky SAW beyond the velocity of the surface-skimming slow shear bulk wave and thus to suppress the energy losses due to bulk-wave radiation. This effect is observed in the admittance of a long resonator for h/λ=9-10% thick electrodes. The decrease of the attenuation and a strong increase in the Q factor of the resonance peak can be seen. A numerical model, based on the periodic Green´s function and the finite element method is used to further quantify the effect. We estimate that for aluminium electrodes of thickness 12% or for gold electrodes of thickness about 3% both the resonance and the antiresonance will be shifted into the nonleaky frequency region
  • Keywords
    Green´s function methods; Q-factor; acoustic materials; aluminium; electrodes; finite element analysis; lithium compounds; surface acoustic wave resonators; surface acoustic waves; 64°YX-cut LiNbO3; Al; LiNbO3; Q factor; SAW; admittance; bulk-wave radiation; energy loss; finite element method; leaky wave propagation; mass loading; numerical model; periodic Green function; resonator; surface-skimming slow shear bulk wave velocity; thick aluminium electrode; Admittance; Attenuation; Electrodes; Energy loss; Frequency estimation; Numerical models; Q factor; Resonance; Surface acoustic waves; Surface waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
  • Conference_Location
    San Antonio, TX
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-3615-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1996.584395
  • Filename
    584395