Towards real-time methane (CH4) capture and detection by nanoparticle-enhanced silicon carbide trampoline oscillators

This digest paper describes the initial efforts on real-time methane (CH₄) capture and detection, by using silicon carbide (SiC) resonant microelectromechanical systems (MEMS) coated with SnO₂ nanoparticles (NPs). The coating greatly boosts the active adsorption area, toward enhancing the capture. SiC tethered square trampoline devices coated with ultrathin SnO₂ layers exhibit robust resonances in both vacuum and air, featuring large capturing area. Closed-loop oscillators with embedded SiC resonators enable fast, real-time readout of device responses upon exposure to CH₄. An established electrochemical sensor is employed to verify the signature of CH₄. SiC trampoline resonators are tested upon controlled CH₄ flux in vacuum, and in atmospheric pressure with N₂ carrier, demonstrating clear responses to CH₄.