Miniature photoacoustic imaging probe using MEMS scanning micromirror

Author

Wenjun Liao ; Wenjing Liu ; Jingjing Sun ; Yiping Zhu ; Lei Wu ; Huikai Xie ; Lei Xi ; Huabei Jiang

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

fYear

2011

fDate

8-11 Aug. 2011

Firstpage

115

Lastpage

116

Abstract

This paper presents the design and characterization of an electrothermally actuated high-fill-factor tip-tilt-piston (TTP) micromirror and its application to three-dimensional (3D) photoacoustic imaging (PAI). The micromirror chip is 2mm × 2mm. It has large scan range (>;25°) at low driving voltage (~4V) and can perform fast raster scanning. A miniature PAI probe with a diameter of 11.5 mm has been developed. The 3D images of in vivo human blood vessels are successfully obtained using this MEMS-based PAI system.

Keywords

actuators; biomedical optical imaging; blood vessels; micro-optomechanical devices; micromirrors; optical design techniques; photoacoustic effect; pistons; probes; MEMS; TTP; design; electrothermal actuation; human blood vessels; micromirror; miniature photoacoustic imaging probe; raster scanning; size 2 mm; tip-tilt-piston; Biomedical imaging; Blood vessels; Micromechanical devices; Mirrors; Probes; Three dimensional displays; Bimorph; Electrothermal; Micromirror; Photoacoustic imaging; Tip-tilt piston;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2011 International Conference on

Conference_Location

Istanbul

ISSN

2160-5033

Print_ISBN

978-1-4577-0334-8

Type

conf

DOI

10.1109/OMEMS.2011.6031113

Filename

6031113