Multi-scale pore membrane for continuous, passive fluid transport in a micro cooling device

We report a novel, passive micropump system utilizing nanowire-decorated pores to form a multi-scale membrane for continuously feeding coolant onto the surface of the wick in a micro-cooling device. The self-driven membrane was designed and fabricated by the combination of electrochemical etching to form the membrane pores in silicon and synthesis of nanowires to increase capillary pressure near the wick surface and enable fluid to flow up and out of the pores onto the wick surface itself. Through experimental testing this passive pumping mechanism was verified to allow for the jumping of microscale gaps making it possible for fluid to flow to an adjacent surface. This allows for a constant supply of fluid for the evaporator minimizing of probability of dryout in a micro-cooling device.