Title :
Stress-tolerant fully inkjet-printed Reed Relays
Author :
Ahosan Ul karim, M. ; Chung, S. ; Alon, E. ; Subramanian, V.
Author_Institution :
Univ. of California, Berkeley, Berkeley, CA, USA
Abstract :
A fully printed micro-electro-mechanical (MEM) Reed Relay is demonstrated to provide zero off-state leakage (IOFF), low on-state resistance (RON) (~15 Ω), and moderate switching delay (~32 μs), while offering excellent immunity to mechanical stress variations in the printed cantilevers. Leveraging the stress gradient in sintered metal nanoparticles films and using a novel device architecture, this device is promising for large area electronics.
Keywords :
cantilevers; gradient methods; ink jet printing; microrelays; nanoparticles; reed relays; synchronisation; MEM reed relay; device architecture; fully inkjet-printed reed relays; large area electronics; mechanical stress; microelectromechanical reed relay; on-state resistance; printed cantilevers; sintered metal nanoparticles films; stress gradient; stress-tolerant reed relays; switching delay; zero off-state leakage; Delays; Logic gates; Nanoparticles; Relays; Silver; Stress; Switches; Inkjet-print; MEMS; nanoparticles; reed relay; sacrificial polymer; stress gradient;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7180987