Design and characterization of mechanically-coupled CMOS-MEMS filters

This work reports on the design and characterization of a mechanically-coupled CMOS-MEMS filter centered at 8 MHz with a narrow bandwidth of 58 kHz (0.72% bandwidth) and an insertion loss around 17 dB via the combination of a post-data de-embedding technique and a filter termination performed in Agilent Advanced Design System (ADS). The high-velocity coupled arraying and gap-reduction mechanism are applied into the constituent resonator arrays of the filter to lower their motional impedance (R_m) down to 88 KΩ and further facilitate the filter termination. Moreover, the proper filter termination resistances (R_Q) are chosen at the input/output ports of the filter for in-band impedance matching and ripple reduction.