DocumentCode :
3463144
Title :
A novel infrared detector using nonlinear vibration for high sensitivity
Author :
Yamazaki, Tsutomu ; Ogawa, Shinichi ; Kumagai, Shinya ; Sasaki, Motoharu
Author_Institution :
Dept. of Adv. Sci. & Technol., Toyota Technol. Inst., Nagoya, Japan
fYear :
2013
fDate :
16-20 June 2013
Firstpage :
2313
Lastpage :
2316
Abstract :
A novel infrared detector that uses nonlinear oscillator is fabricated for achieving high sensitivity. Transducer of the infrared detection is a torsional oscillator consisted of bi-materials. When the incident infrared is absorbed by the torsional oscillator, the oscillator is bended due to the differences in thermal expansions. The bending hardens the spring constant of torsional oscillator to increase the resonant frequency. This is quite different from the conventional vibrational detector that bases on the decrease in the resonant frequency by the increase in the mass of oscillator.
Keywords :
bending; infrared detectors; oscillators; thermal expansion; transducers; vibrations; bending; bimaterial; infrared absorption; infrared detector fabrication; nonlinear oscillator; nonlinear vibration; resonant frequency; spring constant; thermal expansion; torsional oscillator; transducer; vibrational detector; Detectors; Films; Gold; Oscillators; Resonant frequency; Silicon; Springs; Infrared Sensor; Nonlinear Vibration; Torsional Oscillator;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
Type :
conf
DOI :
10.1109/Transducers.2013.6627268
Filename :
6627268
Link To Document :
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