Title :
Piezo-actuated tunable diamond/AlN micro lenses
Author :
Zuerbig, V. ; Paetz, D. ; Pletschen, W. ; Hees, J. ; Sah, R.E. ; Kirste, L. ; Heidrich, N. ; Cimalla, V. ; Nebel, C. ; Ambacher, Oliver ; Lebedev, Vladimir
Author_Institution :
Fraunhofer Inst. for Appl. Solid State Phys. IAF, Freiburg, Germany
Abstract :
Tunable micro lenses based on boron-doped nanocrystalline diamond and aluminum nitride (AlN) thin films are investigated. It is demonstrated that such a material combination is advantageous for the fabrication of highly transparent, mechanically stable optical components capable to operate at high actuation frequencies. In addition, it is shown that radially segmented AlN piezo-actuators allow for free aspheric deformation of the lens surface. It enables the use of such tunable lenses either in wave front filters or for correction of aberrations induced in complex optical systems.
Keywords :
III-V semiconductors; aluminium compounds; aspherical optics; boron; deformation; diamond; micro-optomechanical devices; microactuators; microfabrication; microlenses; nanostructured materials; optical fabrication; optical tuning; piezoelectric actuators; thin films; transparency; wide band gap semiconductors; C:B-AlN; aberration correction; actuation frequencies; aluminum nitride thin film; boron-doped nanocrystalline diamond thin film; complex optical systems; free aspheric deformation; lens surface; piezoactuated tunable microlenses; radially segmented piezoactuators; transparent mechanically stable optical components; wave front filters; Adaptive optics; III-V semiconductor materials; Lenses; Optical filters; Optical imaging; Optical interferometry; Optical surface waves; Aluminum nitride; micro optics; nanocrystalline diamond; piezo-actuation;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627269
