Piezo-actuated tunable diamond/AlN micro lenses

Author

Zuerbig, V. ; Paetz, D. ; Pletschen, W. ; Hees, J. ; Sah, R.E. ; Kirste, L. ; Heidrich, N. ; Cimalla, V. ; Nebel, C. ; Ambacher, Oliver ; Lebedev, Vladimir

Author_Institution

Fraunhofer Inst. for Appl. Solid State Phys. IAF, Freiburg, Germany

fYear

2013

fDate

16-20 June 2013

Firstpage

2317

Lastpage

2320

Abstract

Tunable micro lenses based on boron-doped nanocrystalline diamond and aluminum nitride (AlN) thin films are investigated. It is demonstrated that such a material combination is advantageous for the fabrication of highly transparent, mechanically stable optical components capable to operate at high actuation frequencies. In addition, it is shown that radially segmented AlN piezo-actuators allow for free aspheric deformation of the lens surface. It enables the use of such tunable lenses either in wave front filters or for correction of aberrations induced in complex optical systems.

Keywords

III-V semiconductors; aluminium compounds; aspherical optics; boron; deformation; diamond; micro-optomechanical devices; microactuators; microfabrication; microlenses; nanostructured materials; optical fabrication; optical tuning; piezoelectric actuators; thin films; transparency; wide band gap semiconductors; C:B-AlN; aberration correction; actuation frequencies; aluminum nitride thin film; boron-doped nanocrystalline diamond thin film; complex optical systems; free aspheric deformation; lens surface; piezoactuated tunable microlenses; radially segmented piezoactuators; transparent mechanically stable optical components; wave front filters; Adaptive optics; III-V semiconductor materials; Lenses; Optical filters; Optical imaging; Optical interferometry; Optical surface waves; Aluminum nitride; micro optics; nanocrystalline diamond; piezo-actuation;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627269

Filename

6627269