Nano-opto-mechanical (NOM) acoustic wavefront sensor via ring resonators

Author

Dong, Binhong ; Cai, H. ; Tsai, Julius Minglin ; Kropelnicki, Piotr ; Randles, A.B. ; Tang, M. ; Kwong, D.L. ; Liu, A.Q.

Author_Institution

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore

fYear

2013

fDate

16-20 June 2013

Firstpage

2333

Lastpage

2336

Abstract

Nano-opto-mechanical systems (NOMS) based sensor is attracting widely attention due to its low cost, small footprint and good capability. Optical enabled NOMS acoustic wavefront sensor offers superior resolution and resilience to electromagnetic interference. In this paper, a novel NOMS acoustic wavefront sensor based on ring resonator array is proposed. The resonance wavelength of the ring resonator is modified by the membrane which is beneath the ring resonator can be deformed by the acoustic pressure. It has merits including high sensitivity, good linearity, CMOS compatibility and ease in integration.

Keywords

acoustic transducers; nanosensors; resonators; CMOS compatibility; NOM acoustic wavefront sensor; electromagnetic interference resilience; nanoopto-mechanical acoustic wavefront sensor; ring resonator array; Acoustics; Optical device fabrication; Optical ring resonators; Optical sensors; Optical waveguides; Sensitivity; Silicon; Acoustic wavefront sensor; NOMS; ring resonator array;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627273

Filename

6627273