Electrostatic microactuators in a flexible sheet — Smart MEMS sheet #2

Author

Ataka, M. ; Mita, M. ; Toshiyoshi, Hiroshi ; Fujita, Hideaki

Author_Institution

Center for Int. Res. on MicroMechatronics, Univ. of Tokyo, Tokyo, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

2341

Lastpage

2344

Abstract

We have successfully fabricated electrostatic microactuators in a flexible sheet (i.e. microactuators made of the flexible sheet). In this fabrication, we used Kapton^® sheets (DU PONT-TORAY) of 25μm thick as the flexible (structural) material, one mask and one additional shadow-mask to form comb-drive electrostatic microactuators in the sheet. As the first result, we could obtain the lateral displacement of 1μm to 14μm with applied voltage from 20V to 120V. We also could drive the actuators in the sheet fixed on a curved surface.

Keywords

electrostatic actuators; intelligent actuators; Kapton sheet; comb drive electrostatic microactuator; flexible material; flexible sheet; shadow mask; size 25 mum; smart MEMS; structural material; voltage 20 V to 120 V; Electrodes; Electrostatics; Fabrication; Microactuators; Micromechanical devices; Surface treatment; Smart MEMS sheet; comb-drive actuator; electrostatic micro actuator; flexible MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627275

Filename

6627275