Title :
Electrostatic microactuators in a flexible sheet — Smart MEMS sheet #2
Author :
Ataka, M. ; Mita, M. ; Toshiyoshi, Hiroshi ; Fujita, Hideaki
Author_Institution :
Center for Int. Res. on MicroMechatronics, Univ. of Tokyo, Tokyo, Japan
Abstract :
We have successfully fabricated electrostatic microactuators in a flexible sheet (i.e. microactuators made of the flexible sheet). In this fabrication, we used Kapton® sheets (DU PONT-TORAY) of 25μm thick as the flexible (structural) material, one mask and one additional shadow-mask to form comb-drive electrostatic microactuators in the sheet. As the first result, we could obtain the lateral displacement of 1μm to 14μm with applied voltage from 20V to 120V. We also could drive the actuators in the sheet fixed on a curved surface.
Keywords :
electrostatic actuators; intelligent actuators; Kapton sheet; comb drive electrostatic microactuator; flexible material; flexible sheet; shadow mask; size 25 mum; smart MEMS; structural material; voltage 20 V to 120 V; Electrodes; Electrostatics; Fabrication; Microactuators; Micromechanical devices; Surface treatment; Smart MEMS sheet; comb-drive actuator; electrostatic micro actuator; flexible MEMS;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627275
