High-uniformity post-CMOS uncooled microbolometer focal plane array integrated with active matrix circuit

Author

Gyungtae Kim ; Sungkyu Lim ; Youngsu Kim ; Heeyeoun Kim ; Bootaek Lim ; Taehyun Kim ; Park, Jae Hyo ; Hoonbok Lee ; Hanheung Kim ; Jindeok Seo ; Kyomuk Lim ; Changho Seok ; Hyoungho Ko

Author_Institution

Dept. of Electron., Chungnam Nat. Univ., Daejeon, South Korea

fYear

2013

fDate

16-20 June 2013

Firstpage

2361

Lastpage

2364

Abstract

This paper presents a high-uniformity post-CMOS fabricated uncooled microbolometer focal plane array (MFPA) integrated with an active matrix circuit. The active matrix circuit selects the row and column of MFPA, calibrates output offset and gain, and converts the resistance changes of MFPA to the output currents. The active matrix circuit with column-wise transistor-sharing scheme is proposed to improve the output non-uniformity. The output non-uniformity with proposed scheme is reduced to 26%, compared to the conventional scheme.

Keywords

CMOS image sensors; bolometers; calibration; focal planes; microfabrication; microsensors; CMOS integrated circuit; active matrix circuit; calibration; column wise transistor sharing scheme; microbolometer focal plane array; postCMOS fabricated uncooled MFPA; Arrays; Calibration; Immune system; Matrix converters; Transistors; Transmission line matrix methods; Voltage measurement; Active matrix circuit; Column-wise transistor sharing; Microbolometer focal plane array (MFPA);

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627280

Filename

6627280