Glow-discharge ion-sorption micropump for vacuum MEMS

Author

Grzebyk, Tomasz ; Gorecka-Drzazga, Anna ; Zawada, A. ; Dziuban, Jan A.

Author_Institution

Wroclaw Univ. of Technol., Wrocław, Poland

fYear

2013

fDate

16-20 June 2013

Firstpage

2411

Lastpage

2414

Abstract

A miniature ion-sorption magnetic-field-enhanced glow-discharge MEMS (Micro-Electro-Mechanical System) vacuum pump has been shown. The 12×20×3.4 mm³ micropump is made of silicon and glass. Fabrication process includes several typical deep micromachining procedures followed by multilayer sandwich anodic bonding sealing of machined parts. The pump, with dead volume of circa 0.08 cm³, is able to pump down 25 cm³ to 5×10^-6 hPa (mbar) in several minutes. Preliminary tests have shown no significant degradation of the device at least for 3 hours of the continuous work.

Keywords

glass; glow discharges; micromachining; micropumps; silicon; vacuum pumps; deep micromachining; glow-discharge ion-sorption micropump; microelectro-mechanical system vacuum pump; miniature ion-sorption magnetic-field-enhanced glow-discharge MEMS; multilayer sandwich anodic bonding sealing; vacuum MEMS; Anodes; Cathodes; Glass; Ions; Micromechanical devices; Micropumps; Silicon; MEMS; Vacuum; ion-sorption micropump;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627292

Filename

6627292