Title :
Laser frequency trimming technology based on FBAR
Author :
Shao, Jing-Yu ; Wang, De-Miao ; Dong, Shu-rong
Author_Institution :
Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou
Abstract :
Thin film bulk acoustic resonators (FBAR) can be integrated in RFIC as an excellent RF and MF filter. Aimed at high frequency precision FBAR, a new method of evaporating the electrode layer of FBAR by laser is provided to trim FBAR resonant frequency. The experiment results confirm the feasibility of this method and show with a trimming precision up to 0.06%. Obvious frequency float was not detected. This laser trimming method for FBAR was not reported till now
Keywords :
acoustic resonators; bulk acoustic wave devices; laser beam machining; thin film devices; FBAR resonant frequency; MF filter; RF filter; RFIC; electrode layer; laser frequency trimming technology; thin film bulk acoustic resonators; Electrodes; Film bulk acoustic resonators; Laser feedback; Quantum cascade lasers; Radio frequency; Resonant frequency; Rough surfaces; Surface emitting lasers; Surface roughness; Transistors;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306204
