DocumentCode

3463750

Title

Effect Of Cl Incorporation On The Performance Of Amorphous Silicon Thin Film Transistor

Author

Jong Hyun Choi ; Chang Soo Kim ; Sung Ki Kim ; Jin Jang

fYear

1997

fDate

13-14 Feb. 1997

Firstpage

237

Lastpage

240

Keywords

Amorphous silicon; Hydrogen; Leakage current; Lighting; Optical films; Photoconductivity; Plasma temperature; Semiconductor films; Thin film transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Information Display, 1997., Proceedings of the Fourth Asian Symposium on

Conference_Location

Hong Kong, China

Print_ISBN

962-8273-01-9

Type

conf

DOI

10.1109/ASID.1997.631446

Filename

631446