Title :
Experimental study on the impact of anchor losses on the quality factor of contour mode AlN resonators
Author :
Segovia-Fernandez, Jeronimo ; Cremonesi, Massimiliano ; Cassella, Cristian ; Frangi, Alejandro ; Piazza, Gianluca
Author_Institution :
Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
This paper presents an experimental study on the impact of anchor losses on the quality factor (Q) of laterally vibrating AlN contour mode resonators for three different resonance frequency devices (220 MHz, 370 MHz, and 1.05 GHz). Anchors of different width (Wa) and length (La) were designed as supports for resonators having a vibrating body of identical dimensions. The results confirm that the main source of damping is associated with anchor losses at 220 MHz and interfacial losses at 1.05 GHz. Furthermore, finite element analysis (FEA) was used to model anchor losses in AlN CMRs, exhibiting excellent agreement with the measurements.
Keywords :
III-V semiconductors; Q-factor; aluminium compounds; damping; finite element analysis; micromechanical resonators; piezoelectric transducers; vibrations; wide band gap semiconductors; AlN; CMR; FEA; anchor loss impact; damping; finite element analysis; frequency 1.05 GHz; frequency 220 MHz; frequency 370 MHz; interfacial losses; laterally vibrating AlN contour mode resonators; quality factor; resonance frequency devices; vibrating body; Damping; Electrodes; Finite element analysis; III-V semiconductor materials; Micromechanical devices; Q-factor; Resonant frequency; AlN contour mode resonator; anchor losses; finite element analysis; interfacial losses; quality factor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627307
