Metallic glass micro-mirror integrated with PZT actuation for low resonant frequency and large exciting angle

This paper describes the design, fabrication and characterization of metallic glass micro-mirror integrated with lead zirconate titanate (PZT) actuation for low resonant frequency and large exciting angle. The excellent piezoelectric property of PZT was used to lower the operating voltage. The superior mechanical property of metallic glass resulted from its amorphous structure was used as torsion bar material for improving the performances of the micro-mirror. Two kinds of functional material, PZT and metallic glass, were employed and integrated successfully by compatible Micro Electro Mechanical Systems (MEMS) fabrication processes. The fabricated micro-mirror was excited by PZT actuation beams at resonant frequency. The finite element method was used to simulate and estimate the natural frequency and exciting mode of the micro-mirror structure. The measured resonant frequency of the fabricated micro-mirror is approximately between 55Hz to 57Hz. The largest optical scanning angle 144° was achieved at 55.6Hz resonant frequency and 5V_pp.