15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

Author

Wu, Tsai-Fu ; Sasaki, T. ; Akiyama, Masanori ; Hane, Kazuhiro

Author_Institution

Dept. of Nanomech., Tohoku Univ., Sendai, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

2501

Lastpage

2504

Abstract

We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm× 1.8mm mirror membrane is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.

Keywords

adaptive optics; astronomical instruments; electrostatic actuators; micro-optomechanical devices; micromirrors; optical design techniques; optical fabrication; silicon; Si; all dry release process; astronomical observation; continuous membrane deformable mirror; electrostatic actuator; eutectic wafer bonding; large air gap between; mirror membrane; single crystal silicon; size 1.8 mm; size 15 mum; Actuators; Arrays; Bonding; Electrodes; Mirrors; Silicon; Springs; Au-Si eutectic; continuous membrane; deformable mirror; integration technology; single crystal silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627314

Filename

6627314