32×32 Optical phased array with ultra-lightweight high-contrast-grating mirrors

Author

Yoo, B.W. ; Megens, M. ; Chan, T.K. ; Sun, Tairen ; Yang, Weiguo ; Horsley, David A. ; Chang-Hasnain, Connie J. ; Wu, Ming C.

Author_Institution

Univ. of California, Berkeley, Berkeley, CA, USA

fYear

2013

fDate

16-20 June 2013

Firstpage

2505

Lastpage

2508

Abstract

Optical phased arrays (OPA) with fast response time are of great interest for various applications such as displays, free space optical communications, and laser radar. In this paper, we report on a novel 32×32 OPA with fast response time (<;4 microseconds), large field of view (±2°), and narrow beam divergence (0.1°). This is made possible by integrating ultra-lightweight high-contrast-grating (HCG) mirrors with high-speed electrostatic actuators in a dense two-dimensional array with high fill-factor. Consisting of a thin layer (400nm) of sub-wavelength polysilicon gratings, the HCG mirror has a high reflectivity (99.9%), a broad reflection bandwidth, and weighs only 140pg.

Keywords

beam steering; diffraction gratings; elemental semiconductors; micro-optics; mirrors; optical arrays; reflectivity; silicon; Si; broad reflection bandwidth; dense two-dimensional array; fast response time; field of view; high fill-factor; high-speed electrostatic actuators; narrow beam divergence; optical phased array; reflectivity; size 400 nm; sub-wavelength polysilicon gratings; ultra-lightweight high-contrast-grating mirrors; Arrays; Gratings; Laser beams; Mirrors; Optical reflection; Optical sensors; Reflectivity; Optical phased array (OPA); beamsteering; high contrast grating (HCG); lightweight; micro-electro-mechanical systems (MEMS);

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627315

Filename

6627315