A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor

This paper presents a high performance, automatic mode-matched, single-mass, and fully-decoupled MEMS gyroscope with improved scale factor stability. The mode-matching system automatically achieves and maintains the matching between the drive and sense mode resonance frequencies with the help of dedicated frequency tuning electrodes (FTEs). This method isolates the drive and sense mode frequency response dynamics by keeping the proof mass voltage (V_PM) constant, improving the scale factor stability up to 4.4 times in a temperature range from -20°C to +80°C while maintaining a wide rate bandwidth (above 50 Hz). The presented gyroscope also achieves a very low bias instability of 0.73°/hr and an angle random walk (ARW) of 0.024°/√hr.