Interaction effects of temperature and stress on matched-mode gyroscope frequencies

We present our initial results toward understanding the interaction of temperature and stress on resonant frequencies of a matched-mode SOI-MEMS gyroscope. We also validate a new electrostatic frequency tuning design for gyroscopes that works over large displacements. A stress and temperature gradient is formed on the gyroscope die by using on-chip silicon heaters, affecting the gyroscope frequencies. Simulation and measurements of the gyroscope frequencies under different gradient conditions are compared. We also show that the orientation of the die with respect to an asymmetric package plays an important role in frequency response of the gyroscope to environmental conditions.