Combinatorial materials exploration and composition tuning for the future gate stack structure

A combinatorial ternary composition spread method, which included continuous ternary and binary compositions, was applied for new materials exploration for the future gate stack structure, rapid estimation of permittivity are carried out by microwave microscope as well as conventional C-V measurement. Structural analyses are performed systematically by combinatorial X-ray diffraction equipment. Higher dielectric region are observed in (HfO₂)_x(Y₂ O₃)_y(Al₂O₃)_z and ternary composition area. Al₂O₃ was found to have an ability that prevents HfO₂-Y₂O ₃ alloy from crystallization. the authors found that HfxYxAlzO ternary oxide is a candidate of stable amorphous high-k gate dielectric material with stable interface on Si substrate. The reason of this stability could be explained by charge neutrality based on the phase diagram which is concluded by thermodynamics