Title :
Nanophotonic biosensors in silicon-on-insulator
Author :
Bienstman, Peter ; Werquin, Sam ; Arce, C. Lerma ; Witters, D. ; Puers, Robert ; Lammertyn, J. ; Claes, Tom ; Hallynck, E. ; Hoste, J.-W. ; Martens, David
Author_Institution :
Dept. of Inf. Technol., Photonics Res. Group, Ghent Univ. - imec, Ghent, Belgium
Abstract :
In this paper, two recent advances in silicon ring resonator biosensors are presented. First, we address the problem that due to the high index contrast, small deviations from perfect symmetry lift the degeneracy of the normal resonator mode. This severely deteriorates the quality of the output signal. To address this, we discuss an integrated interferometric approach to give access to the unsplit, high-quality normal modes of the microring resonator. Second, we demonstrate how digital microfluidics can be used for effective fluid delivery to nanophotonic microring resonator sensors fully constructed in SOI.
Keywords :
bioMEMS; biosensors; interferometry; microfluidics; nanophotonics; nanosensors; resonators; silicon-on-insulator; SOI; Si; digital microfluidics; fluid delivery; high index contrast; high-quality normal modes; integrated interferometric approach; nanophotonic biosensors; nanophotonic microring resonator sensors; normal resonator mode; output signal quality; silicon ring resonator biosensors; silicon-on-insulator; small deviations; Biosensors; Microfluidics; Optical ring resonators; Optical surface waves; Optical waveguides; biosensors; digital microfluidics; nanophotonics; peak splitting; ring resonators; silicon;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627335