DocumentCode
3464237
Title
Nanophotonic biosensors in silicon-on-insulator
Author
Bienstman, Peter ; Werquin, Sam ; Arce, C. Lerma ; Witters, D. ; Puers, Robert ; Lammertyn, J. ; Claes, Tom ; Hallynck, E. ; Hoste, J.-W. ; Martens, David
Author_Institution
Dept. of Inf. Technol., Photonics Res. Group, Ghent Univ. - imec, Ghent, Belgium
fYear
2013
fDate
16-20 June 2013
Firstpage
2588
Lastpage
2591
Abstract
In this paper, two recent advances in silicon ring resonator biosensors are presented. First, we address the problem that due to the high index contrast, small deviations from perfect symmetry lift the degeneracy of the normal resonator mode. This severely deteriorates the quality of the output signal. To address this, we discuss an integrated interferometric approach to give access to the unsplit, high-quality normal modes of the microring resonator. Second, we demonstrate how digital microfluidics can be used for effective fluid delivery to nanophotonic microring resonator sensors fully constructed in SOI.
Keywords
bioMEMS; biosensors; interferometry; microfluidics; nanophotonics; nanosensors; resonators; silicon-on-insulator; SOI; Si; digital microfluidics; fluid delivery; high index contrast; high-quality normal modes; integrated interferometric approach; nanophotonic biosensors; nanophotonic microring resonator sensors; normal resonator mode; output signal quality; silicon ring resonator biosensors; silicon-on-insulator; small deviations; Biosensors; Microfluidics; Optical ring resonators; Optical surface waves; Optical waveguides; biosensors; digital microfluidics; nanophotonics; peak splitting; ring resonators; silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location
Barcelona
Type
conf
DOI
10.1109/Transducers.2013.6627335
Filename
6627335
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