• DocumentCode
    3464237
  • Title

    Nanophotonic biosensors in silicon-on-insulator

  • Author

    Bienstman, Peter ; Werquin, Sam ; Arce, C. Lerma ; Witters, D. ; Puers, Robert ; Lammertyn, J. ; Claes, Tom ; Hallynck, E. ; Hoste, J.-W. ; Martens, David

  • Author_Institution
    Dept. of Inf. Technol., Photonics Res. Group, Ghent Univ. - imec, Ghent, Belgium
  • fYear
    2013
  • fDate
    16-20 June 2013
  • Firstpage
    2588
  • Lastpage
    2591
  • Abstract
    In this paper, two recent advances in silicon ring resonator biosensors are presented. First, we address the problem that due to the high index contrast, small deviations from perfect symmetry lift the degeneracy of the normal resonator mode. This severely deteriorates the quality of the output signal. To address this, we discuss an integrated interferometric approach to give access to the unsplit, high-quality normal modes of the microring resonator. Second, we demonstrate how digital microfluidics can be used for effective fluid delivery to nanophotonic microring resonator sensors fully constructed in SOI.
  • Keywords
    bioMEMS; biosensors; interferometry; microfluidics; nanophotonics; nanosensors; resonators; silicon-on-insulator; SOI; Si; digital microfluidics; fluid delivery; high index contrast; high-quality normal modes; integrated interferometric approach; nanophotonic biosensors; nanophotonic microring resonator sensors; normal resonator mode; output signal quality; silicon ring resonator biosensors; silicon-on-insulator; small deviations; Biosensors; Microfluidics; Optical ring resonators; Optical surface waves; Optical waveguides; biosensors; digital microfluidics; nanophotonics; peak splitting; ring resonators; silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
  • Conference_Location
    Barcelona
  • Type

    conf

  • DOI
    10.1109/Transducers.2013.6627335
  • Filename
    6627335