Title :
Self-sensing nanopipette for liquid dispensing and AFM imaging
Author :
Garza, H. H. Perez ; Stoute, Ronald ; Ghatkesar, Murali Krishna ; Staufer, Urs
Author_Institution :
Delft Univ. of Technol., Delft, Netherlands
Abstract :
We present the design, fabrication, and characterization of a self-sensing nanopipette (SSN) that can dispense liquids and perform scanning probe nanolithography. The device consists of a legged hollow SiO2 microfluidic cantilever connected to an on-chip fluid reservoir. The cantilever has a Si3N4 tip with a nozzle for fluid dispensing. The self-sensing capability is given by integrating gold piezoresistors on the legs, where the maximum strain is concentrated. The SSN has a resonance frequency of 122.185 kHz and a stiffness of 4.77 N/m, which are in agreement with the analytical and simulated values. The piezoresistors experienced a change in resistance of 0.35Ω for a cantilever deflection of 18.8 μm, leading to a gauge factor of 0.3. The dispensed liquid has an estimated volume in the range of tens of zeptolitres.
Keywords :
atomic force microscopy; cantilevers; gold; image sensors; microfabrication; microfluidics; microsensors; nanofabrication; nanolithography; nanosensors; nozzles; piezoresistive devices; resistors; silicon compounds; AFM imaging; Au; SSN; SiO2-Si3N4; frequency 122.185 kHz; gold piezoresistor; legged hollow microfluidic cantilever; liquid dispensing; nanofabrication; nozzle; on-chip fluid reservoir; resistance 0.35 ohm; scanning probe nanolithography; self-sensing nanopipette; size 18.8 mum; Gold; Legged locomotion; Liquids; Nanobioscience; Piezoresistive devices; Probes; Strain; Nanopipette; microfluidics; nanolithography; piezoresistor; scanning probe;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627350
