Evaluating uncertainty of the mean diameter of silicon sphere by Spherical Harmonics

Author

Zhang, Jitao ; Li, Yan ; Wu, Xuejian ; Zhang, Liqiong ; Liu, Zhen ; Luo, Zhiyong

Author_Institution

Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China

fYear

2010

fDate

13-18 June 2010

Firstpage

488

Lastpage

489

Abstract

Considering the most accurate target of Avogadro project ever, the methods of estimating the uncertainty of average diameter by Spherical Harmonics (SH) are reevaluated, and the uncertainty component that can not be ignored is emphasized. Five thousand approximate spheres are generated to simulate the features of real sphere. It´s shown that, the estimated uncertainty of the average diameter based on the N-point mean method is incomplete when considering the features of the real sphere. Besides, increasing the number of sampling points can improve the uncertainty of the average diameter.

Keywords

approximation theory; constants; diameter measurement; silicon; Avogadro project; N-point mean method; SH evaluation; mean diameter evaluating uncertainty; sampling points; silicon sphere; spherical harmonics; Bandwidth; Electromagnetic measurements; Equations; Instruments; Least squares approximation; Metrology; Optical interferometry; Sampling methods; Silicon; Uncertainty;

fLanguage

English

Publisher

ieee

Conference_Titel

Precision Electromagnetic Measurements (CPEM), 2010 Conference on

Conference_Location

Daejeon

Print_ISBN

978-1-4244-6795-2

Type

conf

DOI

10.1109/CPEM.2010.5543574

Filename

5543574