3D reconstruction and feature extraction for analysis of nanostructures by SEM imaging

An efficient method for 3D reconstruction of nanostructures based on the SEM imaging principle is reported in this paper. By analyzing the contrast of one single top-view SEM image which contains all the surface information of visible structures, both the 3D morphology and shape parameters of nanostructures can be obtained. Thus it can provide more details of nanostructures and conduct subsequent computational analysis in their performance and applications, such as roughness measurement, optical simulation and properties optimizing, and so on. It becomes a convenient and practical tool to observe nanostructures quantitatively as well as qualitatively.