Title :
High detectivity uncooled thermopile detectors with spectrally selective responsivity
Author :
Gawarikar, A.S. ; Shea, R.P. ; Talghader, Joseph J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA
Abstract :
Fabrication and characterization of high detectivity thermopile infrared detectors with spectrally selective absorption operating at room temperature is described. The detector architecture consists of a Johnson noise limited thermoelectric readout scheme integrated with a resonant cavity coupled absorber and a low thermal conductance support structure. A resonant responsivity enhancement of 4.3 and a peak detectivity of 1.3×109 cm Hz1/2 Watt-1 at 10.5 μm wavelength are demonstrated.
Keywords :
antimony compounds; bismuth compounds; infrared detectors; readout electronics; temperature sensors; thermal noise; thermopiles; Bi2Te3-Sb2Te3; Johnson noise limited thermoelectric readout scheme; high detectivity thermopile infrared detectors; low thermal conductance support structure; resonant cavity coupled absorber; resonant responsivity enhancement; spectrally selective responsivity; temperature 293 K to 298 K; wavelength 10.5 mum; Absorption; Cavity resonators; Detectors; Noise; Optical detectors; Voltage measurement; Wavelength measurement; Thermal detectors; high detectivity; optical cavity; thermoelectrics; wavelength selectivity;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627364
