High detectivity uncooled thermopile detectors with spectrally selective responsivity

Author

Gawarikar, A.S. ; Shea, R.P. ; Talghader, Joseph J.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA

fYear

2013

fDate

16-20 June 2013

Firstpage

2704

Lastpage

2707

Abstract

Fabrication and characterization of high detectivity thermopile infrared detectors with spectrally selective absorption operating at room temperature is described. The detector architecture consists of a Johnson noise limited thermoelectric readout scheme integrated with a resonant cavity coupled absorber and a low thermal conductance support structure. A resonant responsivity enhancement of 4.3 and a peak detectivity of 1.3×10⁹ cm Hz^1/2 Watt^-1 at 10.5 μm wavelength are demonstrated.

Keywords

antimony compounds; bismuth compounds; infrared detectors; readout electronics; temperature sensors; thermal noise; thermopiles; Bi₂Te₃-Sb₂Te₃; Johnson noise limited thermoelectric readout scheme; high detectivity thermopile infrared detectors; low thermal conductance support structure; resonant cavity coupled absorber; resonant responsivity enhancement; spectrally selective responsivity; temperature 293 K to 298 K; wavelength 10.5 mum; Absorption; Cavity resonators; Detectors; Noise; Optical detectors; Voltage measurement; Wavelength measurement; Thermal detectors; high detectivity; optical cavity; thermoelectrics; wavelength selectivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627364

Filename

6627364