Title :
A MEMS enabled integrated microgc platform for on-site monitoring of water organic compounds
Author :
Akbar, Muhammad ; Wang, Dongping ; Shakeel, H. ; Heflin, J.R. ; Agah, Masoud
Author_Institution :
VT MEMS Lab., Virginia Tech, Blacksburg, VA, USA
Abstract :
This paper introduces the first MEMS-based purge-and-trap (P&T) system and reports a new microfabricated column for onsite monitoring of water organic compounds (WOCs). The micro purge extractor (μPE) consists of etched cavity inside 2 cm × 3 cm chip and is used to purge WOCs from aqueous sample. The extracted WOCs are collected onto our previously reported micropreconcentrator (μPC) and subsequently separated by a 1m-long MEMS separation column (μSC). The μSC reported herein, is first of its kind as it is coated with highly stable silica nanoparticles (SNP) utilizing layer by layer (LbL) self-assembly technique. The proposed technique eliminates limitations in current aqueous analysis system and can be employed to develop a highly portable on-site water monitoring system.
Keywords :
chromatography; microfluidics; microsensors; self-assembly; water pollution measurement; MEMS based purge-and-trap system; MEMS enabled integrated microgas chromatography platform; MEMS separation column; aqueous sample; layer by layer self-assembly technique; microfabricated column; micropurge extractor; silica nanoparticle; size 2 cm; size 3 cm; water organic compound on-site monitoring; Fabrication; Micromechanical devices; Monitoring; Nanoparticles; Resists; Silicon compounds; MEMS; Water monitoring; micro gas chromatography; purge and trap; separation column; silica nanoparticle;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627377