Design and fabrication of a novel six supports capacitive micro RF switches with Parylene-C as structural material

This paper introduce design and micro fabrication of a novel six supports shunt capacitive MEMS RF switch with Au/Parylene-C as structural material. This micro switch consists of a dual-layer actuator with 9.526 volts actuation voltage. This switch adopts novel six supports and double actuation electrodes. This special design can obtain good actuating properties, such as lower actuation voltage and more stable working states, and long lifetime etc. Due to complicated structure, the fabrication becomes more difficult. This paper focuses on the fabrication of the MEMS RF switch which can find its application in microwave and mobile communication device