Electromagnetic interference induced during the switching of a capacitive RF MEMS switch

During the switching of a capacitive RF MEMS switch, there will be electromagnetic wave radiated. Based on the dynamic model of the membrane bridge, the switching process is divided here into four stages, and the model of the electromagnetic wave radiated in each stage is developed using Maxwell equations. Finally, the model is verified by comparison with the result of the element area method. In the charging stage and the pull-down stage, there is an electromagnetic pulse radiated. Especially in the charging stage, the total radiated energy is about 1.74 times 10^-8 J. In the discharging stage, the electromagnetic wave radiated is resonance wave whose frequency is about 23.4GHz (it is in the range of the RF signal). So these will remind the designers of adding special circuit which can filter the noise