Title :
A novel double-end heating type MEMS microwave power sensor
Author :
Huang, Cong-Chao ; Huang, Qing-An ; Liao, Xiao-Ping
Author_Institution :
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing
Abstract :
A novel double-end heating type differential thermal balance MEMS microwave power sensor is presented in this paper. Compared with the traditional single-end heating type microwave power sensors, the novel double-end heating type power sensor has many remarkable advantages because of its thermal symmetry. The matching characteristic between coplanar waveguide (CPW) and its two load resistors R1 is then simulated. Lastly, the main characteristic of the unsteady temperature changing process of the CPW load resistors R1 is analyzed when the absorbed microwave power has been converted into heat, and thereby the analytical expressions for the temperature of CPW load resistors R1 and the time constant of the process are obtained
Keywords :
coplanar waveguides; microsensors; microwave circuits; resistors; MEMS microwave power sensor; coplanar waveguide; differential thermal balance power sensor; double-end heating type power sensor; load resistors; thermal symmetry; time constant; unsteady thermal model; Coplanar waveguides; Electromagnetic heating; Micromechanical devices; Microwave devices; Microwave sensors; Power measurement; Resistors; Switches; Thermal resistance; Thermal sensors;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306381
