Title :
An analytical model for the output voltage of four-terminal silicon pressure transducers
Author :
Daoming, Ke ; Junning, Chen ; Lei, Liu ; Qi, Liu ; Tailong, Xu
Author_Institution :
Coll. of Electron. & Technol., Anhui Univ., Hefei
Abstract :
The paper resolved a two-dimensional partial differential equation of transverse piezoresistive effect transducers with the method of perturbation. Relationship between the output voltage and device size has been gotten. We verified that the maximum output voltage is located at the middle point of output terminal. And then the expression of the maximum output voltage is given. The calculation results are accordant with numerical and experimental values of devices. These expressions based on the paper can be used in designs and simulations of four-terminal piezoresistive pressure transducers
Keywords :
partial differential equations; perturbation techniques; piezoresistive devices; pressure transducers; 2D partial differential equation; analytical model; device size; maximum output voltage; perturbation method; piezoresistive pressure transducers; silicon pressure transducers; transverse piezoresistive effect transducers; Analytical models; Educational institutions; Electrodes; Maxwell equations; Partial differential equations; Piezoresistance; Silicon; Stress; Transducers; Voltage;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306389
