Title :
A novel uncooled a-Si microbolometer for infrared detection
Author :
Liu, Xing-Ming ; Han, Lin ; Liu, Li-Tian
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing
Abstract :
A new structure uncooled amorphous silicon (a-Si) microbolometer for infrared detection has been fabricated and characterized. Based on polyimide thermal isolation layer and bottom metal reflective structure, the newly presented bolometer has the advantage of low cost, high yield and high performance. The dependence of the temperature coefficient of resistance on operating temperature has been investigated. The results show that at a chopping frequency of 30Hz and a bias voltage of 5V, the maximum detectivity of 1.7 times 108 cmHzfrac12W-1 is achieved
Keywords :
bolometers; infrared detectors; microsensors; silicon; 30 Hz; 5 V; Si; infrared detection; metal reflective structure; operating temperature; polyimide thermal isolation layer; temperature coefficient of resistance; uncooled microbolometer; Bolometers; Costs; Electromagnetic wave absorption; Fabrication; Infrared detectors; Polyimides; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306396
