Title :
Fabrication and characterization of bulk molybdenum field emission arrays
Author :
Zhu, N.L. ; Xu, K.S. ; Song, L. ; Chen, X. ; Chen, J.
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
Abstract :
This paper reports a simple technology for fabricating high aspect ratio (>10) field emission tips directly in molybdenum substrate by fluorine inductive-coupled-plasma (ICP) etching for the first time. Compared to the traditional Spindt array, the film interface is eliminated, and the device exhibits a low turn-on electric field of 1.21V/μm. Arrays of 1,000,000 tips with 10μm pitch are employed to emit currents of 140μA at electric field strength of 5.48V/μm. A stable, uniform emission was observed in a field emission display. With better conductivity and thermal conductivity, the Mo-FEAs are very promising for long-term and continuous emission.
Keywords :
field emitter arrays; molybdenum; sputter etching; thermal conductivity; Mo; Mo-FEA; current 140 muA; field emission display; film interface; fluorine ICP etching; fluorine inductive-coupled-plasma etching; high aspect ratio field emission tips; molybdenum substrate; size 10 mum; thermal conductivity; Anodes; Electric fields; Fabrication; Luminescence; Mathematical model; Metals; Field Emission Arrays; Inductive Coupled Plasma; Molybdenum;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181136
