Title :
Atmospheric pressure mode localization coupled resonators force sensor
Author :
Montaseri, M.H. ; Xie, J. ; Chang, H. ; Chao, Z. ; Wood, G. ; Kraft, M.
Author_Institution :
Dept. of Electr. Eng., Univ. of Duisburg-Essen, Duisburg, Germany
Abstract :
This paper reports on a 3-DoF mode localization resonant sensor experimentally evaluated under atmospheric conditions. It was demonstrated that using amplitude ratio as an output signal, even when the device is operated in air, yields a higher sensitivity compared to frequency variation sensitivity when assuming vacuum conditions.
Keywords :
atmospheric pressure; force sensors; pressure measurement; pressure sensors; resonators; 3-DoF mode localization resonant sensor; atmospheric pressure mode localization coupled resonator force sensor; vacuum condition; Atmospheric measurements; Fingers; Frequency measurement; Mathematical model; Q-factor; Resonant frequency; Sensitivity; Coupled Resonators; MEMS Sensors; Mode Localization;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181140
