DocumentCode
3465548
Title
Development and characterization of a novel two-dimensional position sensitive silicon strip detector for electron detection
Author
Chuang, Y.J. ; Liao, Y.T. ; Lin, W.R. ; Chen, F.R. ; Chen, P.R. ; Hung, K.Y.
Author_Institution
Ming Chuan Univ., Taoyuan, Taiwan
fYear
2015
fDate
21-25 June 2015
Firstpage
1195
Lastpage
1198
Abstract
A novel silicon strip detector has been developed that has the necessary properties to provide two-dimensional position sensitivity with a moderate number of readouts and single-sided detector fabrication process. The concept is based on segmented pixel electrodes arranged in a projective X-Y readouts, it combines the 2-D position resolution of pixel electrode geometry with the simplicity of the projective readout of a double-sided strip detector. And also with proper segmentation of strip electrodes, the multi-hits induced ghost image problem can be resolved.
Keywords
electron detection; elemental semiconductors; position sensitive particle detectors; readout electronics; silicon; silicon radiation detectors; Si; double-sided strip detector; electron detection; novel two-dimensional position sensitive silicon strip detector; projective X-Y readouts; segmented pixel electrodes; single-sided detector fabrication process; two-dimensional position sensitivity; Detectors; Electron beams; Fabrication; Microscopy; Sensitivity; Silicon; Strips; electron detector; single sided strip detector; two dimensional position sensitive;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location
Anchorage, AK
Type
conf
DOI
10.1109/TRANSDUCERS.2015.7181143
Filename
7181143
Link To Document