DocumentCode :
3465598
Title :
Flow compensation in a MEMS dual-thermal conductivity detector for hydrogen sensing in natural gas
Author :
de Graaf, G. ; Abarca Prouza, A. ; Wolffenbuttel, R.F.
Author_Institution :
Delft Univ. of Technol., Delft, Netherlands
fYear :
2015
fDate :
21-25 June 2015
Firstpage :
1203
Lastpage :
1206
Abstract :
Conventional thermal conductivity detectors (TCDs) demonstrate a flow dependence. The approach presented here to reduce the flow dependence is based on the on-line flow compensation using two thin-film sensors on membranes in parallel on the same chip that are differentially operated. These are laterally identically, but with a different depth of the detection chamber, resulting in different quasi-static sensitivities to the thermal conductivity of the sample gas. The effects of conduction and convection in the structure have been studied using COMSOL Multiphysics. First prototypes have been fabricated and are presently tested.
Keywords :
compensation; convection; flow measurement; flow sensors; gas sensors; heat conduction; hydrogen; membranes; microfabrication; microsensors; temperature sensors; thermal conductivity measurement; thin film sensors; COMSOL Multiphysics; H2; MEMS dual-thermal conductivity detector; TCD; conduction; convection; hydrogen sensing; membrane; microfabrication; natural gas; online flow compensation; thin-film sensor; Cavity resonators; Conductivity; Gas detectors; Heating; Temperature sensors; Thermal conductivity; Hydrogen sensor; MEMS; Thermal conductivity detector; flow compensation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
Type :
conf
DOI :
10.1109/TRANSDUCERS.2015.7181145
Filename :
7181145
Link To Document :
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